In recent years, there is more development of Micro-MIM (Metal-Insulator-Metal) capacitors, because of high energy storage device and their reliable performance. Due to high leakage current problem, the development in this field is quite slow. By overcoming this problem, new structure can be used in various applications. In this project work, structures of Micro-MIM capacitors are designed on Comsol software by using different materials and their respective properties for electrodes and dielectric medium. The main focus of investigation in this project was on insulation layer regarding leakage current. Several materials are investigated for example, silicon dioxide (SiO2), Lanthanim Aluminate (LaAlO3), Parrafinwax and Yittrium Oxide (Y2O3). During the simulation, Barium Titinate (BaTiO3) have low leakage current value is 0.02 mA that is on (40 V) DC.
There are several applications of these structures which include Fabry-Perot optical filter, it is also part of investigation. Fabry-Perot filters are widely used in optical communication for filtering out desired wavelength out of receiving spectrum. It still comes with problem of low transmission rate. In this project, new fabry-perot filter is designed on OpenFilter. Benefit is, high transmission rate of desired wavelength. The main focus of investigation of this project is on high transmission rate. Several materials are investigated for example Titanium Dioxide (TiO2), Aluminum Oxide (Al2O3), Gallium Arsenide (GaAs) and Silicon Nitride (Si3 N4). During the simulation, Aluminum Oxide (Al2O3) have high transmission rate about 98 percent with minimum reflectivity.